JPH0177175U - - Google Patents
Info
- Publication number
- JPH0177175U JPH0177175U JP1987172376U JP17237687U JPH0177175U JP H0177175 U JPH0177175 U JP H0177175U JP 1987172376 U JP1987172376 U JP 1987172376U JP 17237687 U JP17237687 U JP 17237687U JP H0177175 U JPH0177175 U JP H0177175U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- cylindrical member
- stepped portion
- valve body
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims 3
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172376U JPH0177175U (en]) | 1987-11-11 | 1987-11-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172376U JPH0177175U (en]) | 1987-11-11 | 1987-11-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0177175U true JPH0177175U (en]) | 1989-05-24 |
Family
ID=31464349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987172376U Pending JPH0177175U (en]) | 1987-11-11 | 1987-11-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0177175U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03272373A (ja) * | 1989-11-14 | 1991-12-04 | Hitachi Metals Ltd | 高温域用流量制御バルブおよびマスフローコントローラならびに高温域用積層型変位素子 |
-
1987
- 1987-11-11 JP JP1987172376U patent/JPH0177175U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03272373A (ja) * | 1989-11-14 | 1991-12-04 | Hitachi Metals Ltd | 高温域用流量制御バルブおよびマスフローコントローラならびに高温域用積層型変位素子 |